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Product Description: - Elimination of thermal shock (heated) - Reduction of back-side scratches to near zero levels - Elimination of defusible contamination (no metal contaminants) - Ability to operate continuously at elevated temperatures without warpage - Infinite life without vacuum leakage
End Effector INC: Wafer Handling End Effectors
Ceramic Vacuum Clamping End-Effectors
Ceramic end-effectors can be supplied with ESD dissipation which will protect sensitive products during handling
Utilization of standard mounting hardware and standard design configurations delivered from stock, reduces cost and optimizes performance
Product Description: - Reduction of back-side scratches to near zero levels - Elimination of defusible contamination (no metal contaminants) - Ability to operate continuously at elevated temperatures without warpage - Infinite life without vacuum leakage
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